CiS offers professional collaboration and partnership in research, development and series production in

  • Micro-electromechanical systems (MEMS) and micro-optomechanical systems (MOEMS)
  • Silicon detectors

This means inter alia

  • Client and application-specific solutions for microsensor systems and microsystem engineering for the detection of physical, chemical, physiological and other entities
  • R&D services for si-technology, assembly and packaging, testing and analysis
  • Applications and research associations catering to the needs of SMBs

Geared to growth sectors such as

  • Energy/climate
  • Health/nutrition
  • Mobility
  • Safety
  • Communication
  • Material efficiency



Selected examples:

ServiceApplication field
Chip-in-chip assemblyOptical transceiver units
Design of microsensors and model building for microsystemsIndustrial measurement technology
Series production of pressure sensor chips, silicon cantilevers, micro sensing devices, radiation detectorsProcess automation, nano/micro-force sensor systems, high-energy physics, LHC CERN Geneva
Applicative examinations of impedimetric sensors based on capacitive stray field structuresHumidity sensor systems
In-ear sensor for vital signs monitoringMedicine technics
REM, FIB, SIMSSemiconductor process control
3D-depth structuring of siliconHybrid microsystems